Experimenting with Large-Scale Semiconductor Manufacturing Simulations: A Frequency Domain Approach to Factor Screening

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Abstract:

Frequency domain experiments can provide an efficient way to identify important factors of a real system through the use of simulation models. In these experiments, input factors are oscillated at different frequencies. Detecting an oscillation in the output of a particular frequency indicates that the corresponding input variable (or an interaction) has significant impact. This technique is illustrated in factor screening and bottleneck analysis of an actual semiconductor wafer fabrication facility.