|
 |
|
A Review of Real-Time
Control Strategies for Furnace Batch Sizing in
Semiconductor Manufacturing
Authors:
Jennifer Robinson
FabTime Inc. |
John Fowler
Arizona State Univ. |
Jonathan Bard
Univ. of Texas |
Abstract:
This paper presents a review and evaluation of a number of strategies for the control
of batch queueing processes in the semiconductor manufacturing industry. Special attention
is paid to policies that include real-time information about the state of the
manufacturing facility, particularly the expected timing of future arrivals. The studies
evaluated highlight the potential benefits that might stem from taking full advantage of
real-time information. These studies clearly show that using knowledge of future arrivals
can, in many cases, lead to improvements in waiting time, even in the presence of
prediction errors. Several avenues for future research are also discussed.
This paper is available in Adobe PDF format. You can
download a copy in PDF (200 KB) by
right-clicking on this
link. If
you like this paper, you might want to
subscribe to FabTime’s Cycle Time
Management newsletter, a free monthly
email publication.
|
