A Design of Experiments
Methodology for Semiconductor Wafer Fab Capacity Planning
Authors:
Frank Chance
FabTime Inc.
|
Jennifer Robinson
FabTime Inc.
|
John Fowler
Arizona State University
|
Ottmar Gihr
IBM Germany
|
Ben Rodriguez
Nimble nv |
Lee Schruben
Cornell University |
Abstract:
This paper describes a systematic method for analyzing the simultaneous impact of
various loss factors on the capacity of a semiconductor wafer fabrication facility.
Particular emphasis is placed on including cycle time in the capacity analysis. To that
end, a performance measure called cycle time constrained capacity is developed. The method
is illustrated through an investigation of 11 loss factors across four realistic factory
datasets. Suggestions are included on how to implement the methodology, so that the
methodology itself may be immediately transferable, although specific results are factory
dependent.
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