Measurable Improvements in Cycle-Time-Constrained Capacity

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Abstract:

This study uses simulation-based analysis to evaluate the operating practices of a high-volume, multiple-product semiconductor fab, with the goal of finding potential areas for productivity improvement that will yield a quantifiable increase in fab capacity. The parameters setup, batching, tool/operator dedication, lot release, and dispatch rule were studied. The analysis revealed that some of the current operating practices of the factory were beneficial while changing some other practices would increase "cycle-time-constrained capacity" by up to 12%. A significant opportunity for potential improvement for this factory lies in implementing a strict setup avoidance policy. The first implementation in the actual fab is a relaxation of the photolithography equipment dedication which has helped the factory achieve a 25% reduction in cycle time and inventory.

This paper was published in Proceedings of the 6th IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing (ISSM), October 6-8, 1997, San Francisco, A21-A24. You can download a copy in PDF (163 KB) by right-clicking on this link. If you like this paper, you might want to subscribe to FabTime’s Cycle Time Management newsletter, a free monthly email publication.