The Relay Coach - Lot History Analysis

As an example, suppose that the Relay Coach is expediting Lot #2101, with a goal of never having the lot wait for more than 1 hour at any operation. The chart below shows the queue time (in red) and process time (in green) spent by the lot at each operation. On viewing the chart, the Relay Coach observes that Lot #2101 waited in queue for approximately five hours at Operation 1400 (a Wet Etch operation).

The Relay Coach drills down to find more detailed information about why Lot #2101 had to wait for five hours before being processed on the one of the two tools in the tool group Wet Etch4. The chart below shows the moves (in wafers) during each hour that Lot #2101 was waiting for a Wet Etch4 tool for processing. Clearly, some wafers were being processed on the Wet Etch4 tools during this time period. 

Continue to the next page to see how the Relay Coach drills down further, to understand why Lot #2101 was not processed on the Wet Etch4 tool group, even though the tool group was processing something. (Continue)