The Relay
Coach - Root Cause Analysis
Next, the Relay Coach investigates the tool state data
for the Wet Etch4 tool group. The chart below shows the
tool state by tool for the two Wet Etch4 tools, during the
five hour period that Lot #2101 was waiting. One of the
two tools was taken up by Engineering time during the
interval, while the second Wet Etch4 tool was productive
during the interval.
Since the second Wet Etch4 tool was productive during
the entire five-hour period, the next question that the
Relay Coach asks is “what lots was the tool
processing?” The chart below shows the four lots that
were moved out of the Wet Etch4 tool group during the time
period of interest. The red indicates time that each lot
spent in queue, while the green indicates process
time.
Continue to the next page
to see the Relay Coach look at the implications of these
four lots being processed, while Lot #2101 was waiting. (Continue)
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